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TEMPORALLY VARIABLE DEPOSITION RATE OF CDTE IN APPARATUS AND PROCESS FOR CONTINUOUS DEPOSITION

机译:设备中CDTE的时间变化沉积率和连续沉积过程

摘要

APPARATUS 100 IS GENERALLY PROVIDED FOR VAPOR DEPOSITION OF A SUBLIMATED SOURCE MATERIAL AS A THIN FILM ON A PHOTOVOLTAIC MODULE SUBSTRATE 14. THE APPARATUS 100 INCLUDES A DISTRIBUTION PLATE 152 DISPOSED BELOW THE DISTRIBUTION MANIFOLD 124 AND AT A DEFINED DISTANCE ABOVE A HORIZONTAL CONVEYANCE PLANE OF AN UPPER SURFACE OF A SUBSTRATE 14 CONVEYED THROUGH THE APPARATUS 100. THE DISTRIBUTION PLATE 152 DEFINES A PATTERN OF PASSAGES 153 THERETHROUGH CONFIGURED TO PROVIDE GREATER RESISTANCE TO THE FLOW OF SUBLIMATED SOURCE VAPORS AT A FIRST LONGITUDINAL END 160 THAN A SECOND LONGITUDINAL END 161. A PROCESS FOR VAPOR DEPOSITION OF A SUBLIMATED SOURCE MATERIAL TO FORM THIN FILM ON A PHOTOVOLTAIC MODULE SUBSTRATE 14 IS ALSO PROVIDED VIA DISTRIBUTING THE SUBLIMATED SOURCE MATERIAL ONTO AN UPPER SURFACE OF THE SUBSTRATES 14 THROUGH A DISTRIBUTION PLATE 152 POSITIONED BETWEEN THE UPPER SURFACE OF THE SUBSTRATE 14 AND THE RECEPTACLE 116.
机译:通常提供装置100,以将蒸镀的源材料作为薄膜沉积在光电模块基底14上进行汽相淀积。装置100包括分布板152,分布板152分布在分布模板124的下方,并且定义了一个偏差范围底物14的上表面通过设备100进行传送。分配板152定义了一条通道153,其配置为在连续的纵向上连续160个连续的第161个连续时间内,对次品源蒸汽的流动提供更大的阻力。通过在基板14的上下表面和整个分布板面152上将子介质材料分布到基片14的上表面上,还可以将子介质材料蒸镀以在光伏模块基体14上形成薄膜。插座116。

著录项

  • 公开/公告号MY158599A

    专利类型

  • 公开/公告日2016-10-31

    原文格式PDF

  • 申请/专利权人 FIRST SOLAR MALAYSIA SDN. BHD.;

    申请/专利号MY2011PI05934

  • 发明设计人 PAVOL MARK JEFFREY;

    申请日2011-12-07

  • 分类号C23C16;H01L21/306;C23F1;

  • 国家 MY

  • 入库时间 2022-08-21 14:22:53

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