The present invention relates, in general, to the purification of boron trichloride (BCI3). More particularly, the invention relates to a process for minimizing silicon tetrachloride (SiCI4) formation in BCI3 production and/or the removal of S1CI4 in BCI3 product stream by preventing/minimizing the silicon source in the reaction chambers. In addition, a hydride material may be used to convert any SiCI4 present to S1H4 which is easier to remove. Lastly freeze separation would replace fractional distillation to remove SiCI4 from BCI3 that has been partially purified to remove light boilers.
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