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ELECTRODE DESIGN AND LOW-COST FABRICATION METHOD FOR ASSEMBLING AND ACTUATION OF MINIATURE MOTORS WITH ULTRAHIGH AND UNIFORM SPEED
ELECTRODE DESIGN AND LOW-COST FABRICATION METHOD FOR ASSEMBLING AND ACTUATION OF MINIATURE MOTORS WITH ULTRAHIGH AND UNIFORM SPEED
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机译:高速匀速微型电动机的组装与驱动的电极设计与低成本制造方法
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摘要
The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.
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