METHOD FOR MANUFACTURING RESISTIVE THIN FILM FOR BOLOMETER AND BOLOMETER

摘要

The present invention relates to a method for manufacturing a bolometer and a resistive thin film for a bolometer and a bolometer. The method comprises: a first step of producing a reaction solution by dissolving chloride including metal elements in deionized water; a second step of preparing an oxidation solution including an oxidizer oxidizing the metal and a pH control agent controlling the pH; a third step of spraying the reaction solution and the oxidation solution onto a substrate; and a fourth step of depositing an oxide thin film on the substrate by the spraying of the third step, and further comprises a step of performing a subsequent heat treatment on the oxide thin film in an oxidizing atmosphere or an inert atmosphere after the fourth step. Accordingly, the resistive thin film has a low specific resistance, a high TCR value, and a low 1/f noise characteristic. The bolometer has excellent precision and improved temperature stability since a phase of the resistive thin film is stable in an operation temperature range by using the resistive thin film for a bolometer manufactured by the manufacturing method described above.