GAS DELIVERY METHOD AND SYSTEM INCLUDING A FLOW RATIO CONTROLLER USING A MULTIPLE ANTISYMMETRIC OPTIMAL CONTROL ARRANGEMENT

摘要

multiple antisymmetric optimal (MAO) control algorithm is disclosed for a gas delivery system including a flow rate controller for dispensing a single mass flow into multiple flow line. MAO in the control algorithm, each of the flow lines is active in the valve and the flow sensor is provided that is controlled by a linear saturated group bonded SISO feedback control to obtain a target flow rate and set point. For optimum control performance, this SISO controller and a linear saturated group are substantially the same. Each valve control commands are proven to be multiple anti-symmetric with respect to the sum of all the other valve control command. Therefore, MAO control algorithm is used to ensure that there is at least one valve in the allowed maximum open position at any instant, which obtains an optimal solution by a maximum total valve conductance for the flow rate set point for the given set.