CUTTING APPARATUS, ADSORPTION MECHANISM AND APPARATUS EQUIPPED WITH ADSORPTION MECHANISM

摘要

A cutting apparatus of the present invention increases frictional force on a surface of an adsorption jig by using a vibration absorbing material in a cutting table. In the cutting apparatus, the cutting table (16) is configured by attaching the adsorption jig (7) on a base (17). In the cutting table (16), a plurality of adsorption holes (13) prepared in an adsorption member (9), a plurality of through-holes (14) prepared in a metal plate (8) and a space (18) prepared in the base (17) communicate with each other. A vacuum pump (21) suctions a completely sealed substrate (1) via the space (18), the plurality of through-holes (14) and the plurality of adsorption holes (13) sequentially, or each region (6) corresponding to a plurality of products. By using the vibration absorbing material in the adsorption member (9), vibration on the surface of the adsorption member (9) is reduced and then the frictional force on the surface of the adsorption jig (7) can be increased. Therefore, the present invention can significantly increase maintaining force to maintain the completely sealed substrate (1) or each region (6) corresponding to the product.;COPYRIGHT KIPO 2016