METHOD OF GENERATING QUALITY AFFECTED FACTORS FOR SEMICONDUCTOR MENUFACTURING PROCESS AND THEREFORE GENERATING SYSTEM

摘要

The invention discloses a kind of semiconductor fabrication process for generating quality efficiency factor. The generation method for efficiency factor that the quantity we received is in excess of the quantity lost, comprising: step for acquiring client evaluation result, it be by the semiconductor product of practical release, be related to generating quality efficiency factor semiconductor product, by communication network in real time. The quantity we received is in excess of the quantity lost, and efficiency factor further comprises: one step of generation method is for deducting the influence of main quality factor, by the quality of applied statistics model semiconductor product, data after pre-processing to pretreated data; And the semiconductor product of generation step the quantity we received is in excess of the quantity lost efficiency factor. The generation method for efficiency factor that the quantity we received is in excess of the quantity lost can be improved manufacture yield semiconductor maker; The reliability of client, and improve semiconductor product. ;The 2016 of copyright KIPO submissions