LAMINATION TRANSFER FILMS FOR FORMING ARTICLES WITH ENGINEERED VOIDS

摘要

The present invention provides a lithographic apparatus comprising a sacrificial template layer having a first surface and a second surface having a structured surface opposite the first surface and a thermally stable backfill layer matching the structured surface of the sacrificial template layer, Wherein the portion of the sacrificial template layer proximate to the second surface has a greater concentration of thermally stable molecular species than a portion of the sacrificial template layer proximate to the second surface.