首页> 外国专利> DROPLET VOLUME MEASURING DEVICE DROPLET VOLUME MEASURING METHOD SUBSTRATE FOR MEASURING DROPLET VOLUME AND INKJET DRAWING APPARATUS

DROPLET VOLUME MEASURING DEVICE DROPLET VOLUME MEASURING METHOD SUBSTRATE FOR MEASURING DROPLET VOLUME AND INKJET DRAWING APPARATUS

机译:液滴量测定装置液滴量测定方法用基质,用于测定液滴量及注射装置

摘要

The present invention accurately measures a volume of droplets discharged by an inkjet way. A central shaft of a ring-shaped light source (17) and a light shaft of a camera (11) are coincident, and passes a pitch of a droplet (L) on an upper portion of the droplet (L) on a measuring substrate (S). In addition, the ring-shaped light source (17) and the camera (11) are placed such that a diameter direction of the ring-shaped light source (17) is parallel with a surface of the measuring substrate (S). While the ring-shaped light source (17) is lighted, a radius (x) of a circumference of a light reflected from a light irradiated to the droplet (L) from the ring-shaped light source (17) is obtained based on the images captured of the droplet (L) by the camera (11). While a light is irradiated to the droplet (L) from a lower side of the measuring substrate (S), a radius (A) of the droplet (L) is obtained based on the images captured of the droplet (L) by the camera (11). The volume of the droplet (L) is calculated using the radius (x) and the radius (A).
机译:本发明准确地测量通过喷墨方式排出的液滴的体积。环形光源(17)的中心轴与照相机(11)的光轴重合,并且使液滴(L)的间距在测量基板上的液滴(L)的上部通过。 (S)。另外,以使环状光源(17)的直径方向与测定基板(S)的表面平行的方式配置环状光源(17)和照相机(11)。在环形光源(17)被点亮的同时,基于环形光源获得从环形光源(17)照射到液滴(L)的光反射的光的周长的半径(x)。由照相机(11)捕获的液滴(L)的图像。当从测量基板(S)的下侧向液滴(L)照射光时,基于相机捕获的液滴(L)的图像,获得液滴(L)的半径(A)。 (11)。使用半径(x)和半径(A)计算液滴的体积(L)。

著录项

  • 公开/公告号KR20160117206A

    专利类型

  • 公开/公告日2016-10-10

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LIMITED;

    申请/专利号KR20160033950

  • 申请日2016-03-22

  • 分类号G01F19;G01N15/14;G01N21/88;

  • 国家 KR

  • 入库时间 2022-08-21 14:13:26

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