3 3 METHOD OF MANUFACTURING THREE-DIMENSIONAL INERTIA MEASUREMENT SYSTEM AND THREE-DIMENSIONAL INERTIA MEASUREMENT SYSTEM USING THE SAME

摘要

The present invention relates to a method for manufacturing a three-dimensional inertia measurement system and a three-dimensional inertia measurement system using the same. The present invention is provided to prevent hydrogen (H_2) gas generated by an alkaline etching process, which is the final step of surface/bulk micromachining (SBM), from giving a mechanic shock to a released micro electric-mechanical system (MEMS), thereby causing it to break and fall apart. According to the method of manufacturing a three-dimensional inertia measurement system of the present invention, an x-axial accelerometer detecting an x-axial translation, a y-axial accelerometer detecting a y-axial translation, and a z-axis accelerometer detecting a z-axial rotational movement are formed on a single substrate, wherein the x-axial accelerometer, the y-axial accelerometer, and the z-axis accelerometer are formed by SBM and have a release prevention pattern to prevent from releasing in an alkaline etching process.