METHOD AND APPARATUS FOR RECOVERING IODINE HEPTAFLUORIDE-DERIVED IODINE FLUORIDE COMPOUND

摘要

According to the invention, IF ₇ contacting the gas and blood fluoride including, IF ₇ the IF ₅ and converted into a , the IF ₅ by cooling the gas, including, IF ₇ to capture the IF ₅ as derived fluoride iodine compound IF ₇ is provided a method for recovering iodine compounds derived from fluoride. Further, by reacting the recovered the IF ₅ as fluorine IF ₇ generation, and the IF generated ₇ reused for the semiconductor manufacturing process, the can. ;