LIQUID PROCESSING APPARATUS LIQUID PROCESSING METHOD AND STORAGE MEDIUM FOR STORING PROGRAM EXECUTING THE LIQUID PROCESSING METHOD

摘要

A liquid processing apparatus and a liquid processing method capable of uniformly processing a substrate by supplying a plurality of processing liquids by a long nozzle. The substrate processing apparatus includes a substrate holding section, a rotation driving section, a process liquid supply section, and a movement driving section for moving the process liquid supply section. The process liquid supply section is formed long along the first direction, A first process liquid supply unit 81 for supplying a first process liquid to the first process liquid supply unit 81 and a second process liquid supply unit 81 for supplying a second process liquid to the first process liquid supply unit 81, And a liquid supply unit 83. The movement drive unit 123 moves the process liquid supply unit to the first position and the second position in a second direction intersecting the first direction.