首页> 外国专利> Apparatus for performance test of gas regulator test method of hysteresis step function response and set point stability using the apparatus

Apparatus for performance test of gas regulator test method of hysteresis step function response and set point stability using the apparatus

机译:用于气体调节器性能测试的装置,使用该装置的滞后阶跃函数响应和设定点稳定性的测试方法

摘要

The gas supply device includes a gas supply device for supplying a gas, a gas supply regulator for supplying a gas supplied from the gas supply device at a constant pressure, and a second gas supply device for interrupting the flow of gas flowing out from the gas supply regulator A first gauge for measuring the pressure of the gas flowing out from the gas supply regulator; and a port for moving the port, which is a portion coupled to the test regulator, as a portion through which gas introduced from the gas supply regulator is discharged, A second gauge for measuring the pressure of the gas flowing out of the test regulator, a second gauge for measuring the pressure of the gas flowing out of the test regulator, To block flow A second valve, and a flow controller for controlling the flow of gas flowing out from the test regulator, and a hysteresis, a flow rate change response and a set value stability test method using the same. According to the present invention, since the test regulator can be attached / detached by the button operation without tightening the nuts and the like by applying the sample matching device, the test time can be greatly shortened and the same test operation can be performed regardless of the skill of the tester , There is less risk of pressure loss and gas leakage.
机译:气体供应装置包括:气体供应装置,用于供应气体;气体供应调节器,用于以恒定压力供应从气体供应装置供应的气体;以及第二气体供应装置,用于中断从气体中流出的气体的流动。供应调节器第一个压力表,用于测量从气体供应调节器流出的气体的压力;第二计量器,其用于测量从气体供应调节器耦合出的气体,该端口是与测试调节器连接的部分,该端口作为从气体供给调节器引入的气体被排出的部分。用于测量从测试调节器流出的气体压力的第二压力表,用于阻止流量。第二个阀,以及用于控制从测试调节器流出的气体流量以及滞后,流量变化响应的流量控制器。以及使用该方法的设定值稳定性测试方法。根据本发明,由于可以通过按钮操作来安装/拆卸测试调节器,而无需通过应用样品匹配装置来拧紧螺母等,因此可以大大缩短测试时间并且可以执行相同的测试操作,而与测试人员的技能,压力损失和气体泄漏的风险较小。

著录项

  • 公开/公告号KR101614303B1

    专利类型

  • 公开/公告日2016-04-21

    原文格式PDF

  • 申请/专利权人 주식회사 아스플로;

    申请/专利号KR20140109335

  • 发明设计人 강두홍;김진호;

    申请日2014-08-22

  • 分类号H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-21 14:12:40

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