A manufacturing method of a porous thin film with a density gradient a porous thin film manufactured thereby and a porous electrode therewith

摘要

The present invention relates to a three-dimensional network (hereinafter referred to as a " three-dimensional network ") which is manufactured by a dry process and which has a density gradient in a three-dimensional network porous thin film in a thin film thickness direction, The present invention relates to a porous thin film having a structure in which a substrate is placed in a deposition chamber, the inside of the deposition chamber is evacuated, the temperature of the substrate is maintained at a predetermined temperature, Wherein the process gas forms an initial process pressure and the energy of the deposition particles generated by a predetermined method is controlled and deposited on the substrate, wherein the deposition of the deposition particles results in a porous Wherein the temperature of the substrate, the distance between the substrate and the raw material, and the heating temperature of the deposition particles Dimensional open network structure having a density gradient having a density gradient in the thickness direction of the thin film in the porous thin film by changing the energy of the deposited particles by changing at least one of them with time do.