IR PHOTO-DETECTOR USING A METAMATERIAL BASED ON AN ANTIREFLECTION COATING TO MATCH THE IMPEDANCE BETWEEN AIR AND SP RESONATOR

摘要

The present invention is to provide an infrared photodetector and a manufacturing method thereof. The infrared photodetector comprises: a lower contact layer; an optical absorption layer stacked on the lower contact layer; an upper contact layer stacked on the optical absorption layer; a metal layer which causes surface plasmon resonance, is stacked on the upper contact layer, and includes a plurality of holes; and a dielectric layer stacked on the metal layer to satisfy anti-reflection conditions with respect to light transmitted from the outside in a surface plasmon resonance frequency. The dielectric layer is benzocyclobutene (BCB).