apparatus and method for measuring atmosphere temperature of sapphire single crystal growing chamber

摘要

The present invention relates to an apparatus and a method for measuring the atmospheric temperature of a sapphire single crystal growth chamber which can indirectly and accurately estimate the temperature of a molten metal in a sapphire single crystal growth chamber, A chamber lid assembled to the opening of the body to seal the chamber body; At least one atmosphere temperature sensor installed in the chamber lid so as to indirectly measure the temperature of the sapphire molten metal accommodated in the chamber body and measuring the atmospheric temperature of the internal gas of the chamber body; And a temperature calculation control part for receiving the atmospheric temperature measurement value from the atmospheric temperature sensor and calculating a molten metal temperature estimation value of the sapphire molten metal.