ATOMOSPHERIC PRESSURE PLASMA PROCESSING APPARATUS FOR REMOVING HIGH CONCENTRATED HYDROGEN PEROXIDE

摘要

The present invention relates to an apparatus for eliminating highly concentrated hydrogen peroxide steam, and more particularly to an atmospheric plasma apparatus for eliminating highly concentrated hydrogen peroxide steam, which resolves hydrogen peroxide steam by applying an electrode structure for plasma discharge without supply of external gas. The atmospheric plasma apparatus comprises: a reaction chamber which includes an input grid and an output grid; and one or more electrode assemblies respectively including an internal electrode, an external perforated electrode, and a dielectric. The atmospheric plasma apparatus according to the present invention presents an atmospheric plasma electrode structure which can discharge plasma by using only air or hydrogen peroxide steam without supply of external gas, thereby enabling a process of treating highly concentrated hydrogen peroxide to be permanently performed by using atmospheric plasma, rather than by using an existing material, such as a consumable catalyst for decomposition of hydrogen peroxide or an adsorbent. Furthermore, an existing adsorbent capable of adsorbing hydrogen peroxide and the like can be additionally used, thereby effectively eliminating hydrogen peroxide steam within a short time.