FLUX TOOL AND BALL TOOL IMPROVING PROCESS ACCURACY AGAINST MATERIAL DEFORMATION

摘要

The present invention provides a flux tool and a ball tool that perform a ball mount process for a material in which a plurality of work regions are defined. According to the present invention, the ball tool comprises: a housing having a plurality of spaces formed therein to be separated from each other by partitions, corresponding to a plurality of work regions of a material; a plurality of work portions corresponding to the work regions of the material, and having a plurality of adsorption holes protruding from a lower surface of the housing and having eject pins inserted thereinto; a plurality of vacuum flow paths formed in the housing, communicating with the spaces respectively, and controlled independently of one another; a plurality of lift driving units mounted on an upper portion of the housing to operate a plurality of driving shafts extending the spaces, respectively; and a plurality of lifting units connected to the driving shafts, respectively. According to the present invention, a single material is divided into a plurality of work regions, and a flux dotting process and a solder ball bonding process are independently performed for each work region, thereby greatly reducing the risk of process defects caused by contraction or expansion of the material as compared to the case of processing the entirety of the material at once. Thus, accuracy of the ball mount process can be significantly improved. In particular, a failure rate of the ball mount process of bonding micro solder balls with high accuracy can be greatly reduced.;COPYRIGHT KIPO 2016