MICROELECTRODE ARRAY AND PACKAGE FOR LIQUID CRYSTAL POLYMER BASED NEUROPROSTHESES AND MANUFACTURING METHOD THEREOF

摘要

A method of manufacturing an electrode array for a neural implant based on a liquid crystal polymer according to the present invention includes the steps of forming a seed layer on a liquid crystal polymer substrate, forming a plating mold having a pattern selectively exposing an upper part of the seed layer A step of forming an electrode by plating the electrode material on the exposed seed layer using the plating mold as a plating barrier layer, removing the seed layer and the seed layer below the plating mold, and forming a liquid crystal polymer A step of filling the electrode by pressing the cover layer; and a step of forming an electrode site exposing an upper portion of the electrode by selectively removing a part of the liquid crystal polymer cover layer.