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PIEZOELECTRIC ELEMENT, MULTILAYER PIEZOELECTRIC ELEMENT, HEAD FOR LIQUID EMISSION, DEVICE FOR LIQUID EMISSION, ULTRASONIC MOTOR, OPTICAL DEVICE AND ELECTRIC EQUIPMENT
PIEZOELECTRIC ELEMENT, MULTILAYER PIEZOELECTRIC ELEMENT, HEAD FOR LIQUID EMISSION, DEVICE FOR LIQUID EMISSION, ULTRASONIC MOTOR, OPTICAL DEVICE AND ELECTRIC EQUIPMENT
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机译:压电元件,多层压电元件,液体排放头,液体排放设备,超声波电机,光学设备和电气设备
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摘要
1. A piezoelectric element comprising: a first electrode; a second electrode; a piezoelectric material comprising perovskite-type metal oxide represented by the general formula (1) (BaCa) (TiZr) O (where 1.00≤a≤1.01, 0.02≤x≤0.30, 0,020≤y 0.095 and y≤x) (1), and a component of manganese, wherein the metal-based manganese content with respect to 100 parts by weight of perovskite-type metal oxide is 0.02 parts by weight or more and 0.40 parts by weight or less, and the piezoelectric material is formed crystalline grains having an average circular equivalent diameter greater than 1 μm and less than 10 μm, and moreover, piezoelectric ktrichesky material has a relative density of 93.0% or more and 100% or menee.2. The piezoelectric element according to claim 1, wherein x and y in the main component of the piezoelectric material satisfy the conditions of 0.125≤x≤0.175 and 0.055≤y≤0.09, respectively, and a manganese content on a metal base with respect to 100 parts by weight of metal oxide of the type perovskite is 0.02 parts by weight or more and 0.10 parts by weight or less. 3. The piezoelectric element according to claim 1 or 2, in which x and y in the main component of the piezoelectric material satisfy 0.155≤x≤0.300 and 0.041≤y≤0.069, respectively, and the content of manganese on a metal base with respect to 100 weight parts of perovskite-type metal oxide is 0.12 parts by weight or more and 0.40 parts by weight or less. 4. The piezoelectric element according to claim 1 or 2, in which 0.140≤x≤0.175.5. The piezoelectric element according to claim 1 or 2, in which 0,055≤y≤0,075.6. A multilayer piezoelectric element comprising: layers of a piezoelectric material; electrodes, including internally
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