Method and device for saving energy and at the same time increasing the throughput speed in vacuum coating systems

摘要

Apparatus and method for energy saving and at the same time increasing the throughput speed in vacuum coating installations consisting of a sequence of sputtering segments (3) and gas separation segments (2) with a continuous substrate plane (1), having the following features: each of the sputter segments (3) consists of a boiler pan (12) with an internal transport device (11) wherein the boiler flange (6) in the immediate vicinity above the substrate level (1) is attached and wherein a cathode -Bearing block (5) with targets (8) and gas inlet channels (10) in the immediate vicinity of the substrate with splash plates (9) in the boiler cover (4) are located, b) the gas separation segments (2) have in the region of the substrate level (1) a tunnel cover (14) extending over the entire length of the gas separation segment (2); c) the evacuation of sputter segments (3) and / or gas separation segments (2) takes place by means of one or more vacuum pumps (15), while the case conveyed air is collected in a variable-volume air reservoir (25).