in accordance with various designs can be a beschichtungsanordnung (100), a prozesskammer (102) with at least one beschichtungsvorrichtung (104) for coating a substrate (106) in a beschichtungsbereich (108) of the prozesskammer (102) and one or more gas discharge lamps (1) 10) for exposing a substrate (106) in the beschichtungsbereich (108) inwith the one or more gas discharge lamps (110) on the beschichtungsvorrichtung (104) opposite side of the beschichtungsbereiches (108) are arranged.
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