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Thermo diodes element for a photosensor to the infrared -), photosensor and a method for producing a thermo diodes element
Thermo diodes element for a photosensor to the infrared -), photosensor and a method for producing a thermo diodes element
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机译:用于红外光电传感器的热敏二极管元件,光电传感器及其制造方法
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摘要
The present invention relates to a thermo diodes element for a photosensor for a thermocamera to the infrared radiation -. The thermo diodes element has, on a semiconductor substrate having a first layer and a to the first layer adjacent second layer, a bottom doping zone in the first layer, a sides doping zone in the second layer, wherein the bottom doping zone and pages doping zone have the same first doping type, and a further doping zone in the second layer as a island in the sides of doping zone, wherein the bottom doping zone on the further doping zone is located adjacent, wherein the further doping zone a to the first doping type opposite second doping has the type.
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