首页> 外国专利> Device and method for recording and evaluating microscopic and / or speckle images of samples or surfaces of a sample plane with a Auflichtaufbau and their use

Device and method for recording and evaluating microscopic and / or speckle images of samples or surfaces of a sample plane with a Auflichtaufbau and their use

机译:用Auflichtaufbau记录和评估样品或样品平面表面的显微和/或斑点图像的装置和方法及其用途

摘要

The invention relates to a device for recording microscopic images and/or speckle images of samples or surfaces of a sample plane and the use thereof. Here, an epi-illumination design, in which coherent light is directed perpendicularly onto a sample plane from a punctiform illumination source, is present. Light reflected by the sample plane and/or a sample arranged on the sample plane is directed to an effective surface of a detector array, which is aligned parallel to the sample plane, without an imaging optical element arranged therebetween in the beam path. Here, the detector array is connected to a data processing unit, in which there is a calculation of microscopic images and/or speckle images, which were registered at time intervals M and/or after the occurrence of at least one event, and further variables derivable therefrom.
机译:本发明涉及一种用于记录样品或样品平面的表面的显微图像和/或斑点图像的装置及其用途。在这里,存在一种落射照明设计,其中相干光从点状照明源垂直指向样品平面。由样品平面和/或布置在样品平面上的样品反射的光被引导至检测器阵列的有效表面,该检测器阵列平行于样品平面对准,而在光束路径中没有布置在其间的成像光学元件。在此,探测器阵列与数据处理单元连接,在该数据处理单元中计算以时间间隔M和/或在至少一个事件发生之后记录的显微图像和/或斑点图像,以及其他变量。从中派生。

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