Apparatus and method for beam diagnosis to the laser machining - optics (prl - 2015 - 001)

摘要

The present invention relates to a device for determining geometric parameters of a laser beam. For this purpose, a device is proposed which has an optical system, a device for the coupling-out of radiation, a beam diagnosis - device, and a reflector - element contains. The optical system is for focusing a laser beam into a machining - region. The device for the coupling-out of radiation is designed for the coupling-out of radiation, which in a direction opposite the laser beam by the optical system runs. The reflector - element has a first surface, the partially reflecting and is curved. The reflector - element is positioned in a positioning - region between the optical system and the machining - region. In this case, the curvature of the first surface of the reflector - element equal to a central curvature of a wave front of the laser beam focused by the optical system in the positioning - region of the reflector - element. The present invention also relates to a method for determining geometric parameters of a laser beam, which comprises the steps of. A laser beam is by means of an optical system into a processing region - focused. A reflector - element with a first surface, in a positioning - region between the optical system and the machining - range. In this case, the first surface of the reflector - element curved and the reflector - element is positioned in a positioning - region, in which a mean curvature of the wave front of the laser beam focused by the optical system to be equal to the curvature of the first surface of the reflector - element is. A portion of the laser beam focused on the first surface of the reflector - element in the direction of the optical system is reflected back. A portion of the reflected beam is coupled. From the output beam, by means of a beam diagnosis - means includes at least a geometric parameters are determined.