Method for producing a tubular cathode for use in PVD ARC coating systems

摘要

A method for producing a tube cathode for use in PVD ARC coating systems, wherein the tube cathode has a carrier tube (1) and a layer (4) of a coating material applied to its lateral surface (2), comprises the following method steps: providing the carrier tube (1 ) with one of the tube cathode to be produced corresponding basic shape, - applying the layer (4) of the coating material on the support tube (1) by thermal or cold gas spraying as open-pore layer with a density between greater than 60% and less than 99% of the theoretical density, - capsules the coated carrier tube (1) into a container (8) suitable for hot isostatic pressing, - evacuation and sealing of the container (8), - hot isostatic pressing of the container (8) with the coated carrier tube (1) with compression of the layer (4) of the coating material to a density of greater than 99% of the theoretical density, and Removing the cap (5) of the container (8).