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METHOD FOR DETERMINING A REPAIR SHAPE OF A DEFECT ON OR IN THE VICINITY OF AN EDGE OF A FEATURE OF A PHOTOMASK
METHOD FOR DETERMINING A REPAIR SHAPE OF A DEFECT ON OR IN THE VICINITY OF AN EDGE OF A FEATURE OF A PHOTOMASK
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机译:确定光罩特征边缘附近或附近缺陷的修补形状的方法
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摘要
Determining a repairing form of a defect at or close to an edge of a substrate. The defect may be scanned with a scanning probe microscope to determine a three-dimensional contour of the defect. The defect may be scanned with a scanning particle microscope to determine the shape of the at least one edge of the substrate. The repairing form of the defect may be determined from a combination of the three-dimensional contour and the shape of the at least one edge.
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