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PROCESS FOR PERFORMING AUTOMATED MINERALOGY

机译:执行自动矿物学的过程

摘要

A method and system for determining the mineral content of a sample using an electron microscope. The method includes directing an electron beam toward an area of interest of a sample, the area of interest comprising an unknown composition of minerals. The working distance between the backscattered electron detector of the microscope and the area of interest of the sample is determined. Compensation is made for the difference between the working distance and a predetermined working distance in which the predetermined working distance being the working distance that provides desired grayscale values for detected backscattered electrons. One way of compensating for working distance variation is to used an autofocus feature of the microscope to adjust the working distance. Backscattered electrons from the area of interest of the sample are then detected.
机译:一种使用电子显微镜确定样品矿物质含量的方法和系统。该方法包括将电子束指向样品的感兴趣区域,该感兴趣区域包括未知的矿物成分。确定了显微镜的反向散射电子检测器与样品感兴趣区域之间的工作距离。补偿工作距离与预定工作距离之间的差,其中预定工作距离是为检测到的反向散射电子提供所需灰度值的工作距离。补偿工作距离变化的一种方法是使用显微镜的自动对焦功能来调整工作距离。然后检测样品感兴趣区域中的反向散射电子。

著录项

  • 公开/公告号EP2939008B1

    专利类型

  • 公开/公告日2017-09-06

    原文格式PDF

  • 申请/专利权人 FEI COMPANY;

    申请/专利号EP20130869553

  • 发明设计人 SMITH MICHAEL D.;MOELLER KURT;

    申请日2013-12-26

  • 分类号G01N23/225;G01N23/203;H01J37/20;H01J37/21;

  • 国家 EP

  • 入库时间 2022-08-21 14:06:09

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