首页> 外国专利> METHOD TO TRANSFER TWO DIMENSIONAL FILM GROWN ON METAL-COATED WAFER TO THE WAFER ITSELF IN A FACE-TO-FACE MANNER

METHOD TO TRANSFER TWO DIMENSIONAL FILM GROWN ON METAL-COATED WAFER TO THE WAFER ITSELF IN A FACE-TO-FACE MANNER

机译:将面对面方式将金属涂层晶圆上生长的二维薄膜转移至晶圆本身的方法

摘要

A method of in-situ transfer during fabrication of a component comprising a 2-dimensional crystalline thin film on a substrate is disclosed. In one embodiment, the method includes forming a layered structure comprising a polymer, a 2-dimensional crystalline thin film, a metal catalyst, and a substrate. The metal catalyst, being a growth medium for the two-dimensional crystalline thin film, is etched and removed by infiltrating liquid to enable the in-situ transfer of the two-dimensional crystalline thin film directly onto the underlying substrate.
机译:公开了一种在衬底上制造包括二维晶体薄膜的部件的过程中的原位转移方法。在一个实施例中,该方法包括形成包括聚合物,二维晶体薄膜,金属催化剂和基底的层状结构。通过渗入液体来蚀刻和去除作为二维晶体薄膜的生长介质的金属催化剂,以使二维晶体薄膜直接原位转移到下面的衬底上。

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