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PERFORMANCE OPTIMIZATION OF A DIFFERENTIAL CAPACITANCE BASED MOTION SENSOR
PERFORMANCE OPTIMIZATION OF A DIFFERENTIAL CAPACITANCE BASED MOTION SENSOR
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机译:基于差分电容的运动传感器的性能优化
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摘要
A system includes a capacitance sensor having an inertial proof mass disposed between a first electrode structure and a second electrode structure. A switching system is switchable between providing one of a positive charge pulse and a negative charge pulse to one of the first electrode structure and the second electrode structure. A controller controls the switching of the switching circuit to provide one of the positive charge pulse or the negative charge pulse to the first electrode structure during a first portion of a charge cycle time period and to provide an opposite polarity charge pulse from that provided to the first electrode structure to the second electrode structure during a second portion of the charge cycle time period to generate an error signal with respect to the inertial proof mass of the capacitance sensor.
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