DESIGN AND FABRICATION OF ACOUSTIC WAVE FILTERS HAVING PLATE MODES

摘要

Methods of designing surface acoustic wave, SAW, filters and SAW filters fabricated on piezoelectric substrates are disclosed. A filter design including two or more SAW resonators may be established. Admittances (620, 622) of relevant plate modes associated with each of the two or more SAW resonators may be modeled and added in parallel with the admittances of the respective SAW resonators (610). The filter design including the admittances of relevant plate modes may be iterated to establish a final filter design that satisfies a set of design requirements. The filter may be fabricated with the piezoelectric substrate (252) being a piezoelectric wafer with a predetermined thickness, the piezoelectric wafer being part of a composite substrate (150).