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AN IMAGING SYSTEM IN REFLECTION MODE USING COHERENT DIFFRACTION IMAGING METHODS AND USING MICRO-PINHOLE AND APERTURE SYSTEM
AN IMAGING SYSTEM IN REFLECTION MODE USING COHERENT DIFFRACTION IMAGING METHODS AND USING MICRO-PINHOLE AND APERTURE SYSTEM
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机译:使用相干衍射成像方法并使用微针孔和孔径系统的反射模式成像系统
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摘要
A reflective sample, such as a mask, is imaged in an optics system. A radiation source emits a light beam with relatively low coherence. A first focusing element focuses the beam before a mirror reflects the focused beam towards the sample at an incidence angle of between 2 and 25° A pinhole aperture plate upstream of the sample has a first aperture to focus and cut-off the beam diameter to form a more monochromatic beam. The sample is displaced by a mechanism in a direction perpendicular to the normal vector of the sample surface while it reflects the light beam. The reflected beam passes a second aperture in the pinhole aperture plate next to the first aperture on its way to a pixel detector. The second aperture limits the diameter of the reflected beam, thereby adjusting the diameter of the light beam before it reaches the pixel detector.
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