首页> 外国专利> BEAM DISTRIBUTING OPTICAL DEVICE, ILLUMINATING OPTICAL UNIT COMPRISING A BEAM DISTRIBUTING OPTICAL DEVICE OF SAID TYPE, OPTICAL SYSTEM COMPRISING AN ILLUMINATING OPTICAL UNIT OF SAID TYPE, AND PROJECTION LIGHTING APPARATUS COMPRISING AN OPTICAL SYSTEM OF SAID TYPE

BEAM DISTRIBUTING OPTICAL DEVICE, ILLUMINATING OPTICAL UNIT COMPRISING A BEAM DISTRIBUTING OPTICAL DEVICE OF SAID TYPE, OPTICAL SYSTEM COMPRISING AN ILLUMINATING OPTICAL UNIT OF SAID TYPE, AND PROJECTION LIGHTING APPARATUS COMPRISING AN OPTICAL SYSTEM OF SAID TYPE

机译:光束分配光学装置,发光装置,其包括SAID型的光束分配光学装置,光学系统,其包括SAID型的发光光学单元,以及投影照明装置,其包括SAID型的光学系统。

摘要

A beam distribution optical unit serves for splitting an incident beam of illumination light into at least two emergent illumination-light beams. The beam distribution optical unit has at least one blazed reflection grating having reflective grating structures. The result is an optical unit in which a plurality of illumination-light beams are efficiently produced from one incident beam of illumination light.
机译:光束分布光学单元用于将入射的照明光分成至少两个出射的照明光束。光束分布光学单元具有至少一个具有反射光栅结构的闪耀反射光栅。结果是一种光学单元,其中从一个入射照明光光束有效地产生多个照明光束。

著录项

  • 公开/公告号EP3111269A1

    专利类型

  • 公开/公告日2017-01-04

    原文格式PDF

  • 申请/专利权人 CARL ZEISS SMT GMBH;

    申请/专利号EP20150708760

  • 申请日2015-02-23

  • 分类号G02B26/08;G03F7/20;

  • 国家 EP

  • 入库时间 2022-08-21 14:02:12

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