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PIEZOELECTRONIC DEVICE, PROBE, ELECTRONIC APPARATUS, AND ULTRASONIC IMAGING APPARATUS

机译:压电设备,探头,电子设备和超声成像设备

摘要

A piezoelectric device (57) includes: an elastic layer (58) that forms an insulating surface region at least partially and has an amorphous structure or random orientation at least in the surface region; a piezoelectric body (63) that is provided on the elastic layer (58), has a first surface in contact with the elastic layer (58) and a second surface on an opposite side to the first surface, and is (100) preferentially oriented in an orientation region corresponding to the surface region in a plan view; a first electrode (61) provided on the second surface of the piezoelectric body (63); and a second electrode (62) that is provided on the second surface of the piezoelectric body (63) . A gap (64) is formed between the first (61) and second electrodes (62) corresponding to the orientation region in the plan view.
机译:压电器件(57)包括:弹性层(58),该弹性层(58)至少部分地形成绝缘表面区域并且至少在该表面区域中具有非晶结构或随机取向。压电体(63),其设置在弹性层(58)上,具有与弹性层(58)接触的第一表面和与第一表面相反的一侧的第二表面,并且优选地被取向(100)在平面图中对应于表面区域的取向区域中;在压电体(63)的第二面上设有第一电极(61)。第二电极(62)设置在压电体(63)的第二表面上。在平面图中对应于取向区域的​​第一电极(61)和第二电极(62)之间形成有间隙(64)。

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