MANUFACTURING METHOD OF FLOW PASSAGE STRUCTURE, FLOW PASSAGE STRUCTURE AND MOLD

摘要

PROBLEM TO BE SOLVED: To enhance strength of a flow passage.;SOLUTION: There is provided a manufacturing method of a flow passage structure having a process for preparing a mold 30 having an irregular shape on a main surface and an open hole 36 penetrating to another main surface on a bottom surface of a recess 32 of the irregular shape, a process for forming a liquid photosetting resin 24 on a substrate 10, a process for curing the photosetting resin with a state that the one main surface of the meal is pressed to the photosetting resin to form a resin film 16 having the recess 26 and a projection 28 corresponding to the irregular shape of the mold and a process for conjugating a lid 22 covering the recess on a top face of the projection of the resin film to form a flow passage 12 consisting of the recess.;SELECTED DRAWING: Figure 4;COPYRIGHT: (C)2017,JPO&INPIT