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CORE DEVIATION AMOUNT CALCULATION METHOD OF SURFACE SHAPE MEASUREMENT DEVICE, AND SURFACE SHAPE MEASUREMENT DEVICE
CORE DEVIATION AMOUNT CALCULATION METHOD OF SURFACE SHAPE MEASUREMENT DEVICE, AND SURFACE SHAPE MEASUREMENT DEVICE
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机译:曲面形状测量装置的核心偏差量计算方法及曲面形状测量装置
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摘要
PROBLEM TO BE SOLVED: To provide a surface shape measurement method, a core deviation amount calculation method, and a surface shape measurement device capable of measuring the diameter of a work with high precision and reproducibility and capable of performing measurement excellent in versatility.SOLUTION: A surface shape measurement method includes: a first acquisition step of acquiring first shape data showing a surface shape of a work W when the displacement of the surface of the work is detected by a detector 26, while relatively rotating the work and the detector which is disposed on one side of the work around a rotation center; and a second acquisition step of acquiring second shape data showing the surface shape of the work when the displacement of the surface of the work is detected by the detector, while relatively rotating the work and the detector which is disposed on the other side of the work around the rotation center.SELECTED DRAWING: Figure 1
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