LINE EXPANSION COEFFICIENT MEASUREMENT METHOD OF STEP GAUGE, MEASUREMENT DEVICE AND REFERENCE GAUGE

摘要

PROBLEM TO BE SOLVED: To provide a line expansion coefficient measurement method of a step gauge, measurement device and reference gauge that can highly accurately and inexpensively measure a line expansion coefficient of step gauges of various lengths, and can efficiently measure the line expansion coefficient for each section of an intermediate part of the step gauge.;SOLUTION: A line expansion coefficient measurement method of a step gauge is configured to: support a step gauge 10 serving as a measurement object, and a reference gauge 20 in parallel with each other inside a constant temperature tank; detect positions of measurement start points 11S, 12S and 13S, measurement end points 11E, 12E and 13E, reference start points 21S, 22S and 23S, and reference end points 21E, 22E and 23E by means of a measurement probe with an internal temperature of the constant temperature tank as a first temperature; conduct a comparative measurement of each length of a plurality of measurement sections S11, S12 and S13 on the basis of lengths of corresponding reference sections S21, S22 and S23; similarly conduct the comparative measurement thereof with the internal temperature of the constant temperature tank as a second temperature; and calculate a line expansion coefficient of each section from a measurement length at the first temperature in each of the measurement sections S11, S12 and S13, and a measurement length at the second temperature therein.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2017,JPO&INPIT