TEST SPECIFICATION AND METHOD FOR IMPEDANCE CALIBRATION OF PROBE SYSTEM, PROBE SYSTEM INCLUDING THE TEST SPECIFICATION, OR PROBE SYSTEM USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a test specification and method for impedance calibration of a probe system and a probe system including the test specification and/or using the method.SOLUTION: The test specification includes at least one test structure 110 and the test specification further includes an alignment structure 200 associated with the test structure 110. The test specification includes a plurality of test structures 110, and the plurality of test structures 110 includes a thin film through test structure 120 and a thin film offset test structure 130. The plurality of test structures 110 is positioned so as to simultaneously contact a plurality of probe regions 42 of a probe head 40. A calibration method of the probe system 20 is included.SELECTED DRAWING: Figure 1