COLUMNAR LAMINAR FLOW GENERATION DEVICE AND COLUMNAR LAMINAR FLOW GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a columnar laminar flow generation device capable of generating a columnar laminar flow.SOLUTION: A columnar laminar flow generation device includes a placing section for placing an object to be processed, a gas blowout section having an opening, and a gas suction path. The placing section is located in a space where the inner wall surface of the opening is extended, as the outer peripheral surface, in a direction perpendicular to the opening. The opening has a gas outlet for blowing gas to the inner wall surface in one direction perpendicular to the opening, and the gas suction path is formed to suck the gas in the reverse direction from the blowing direction.SELECTED DRAWING: Figure 3