REFINING METHOD USING LIQUID AS REFINING OBJECT, REFINING METHOD USING LIQUID CONTAINING SILICON COMPOUND AS REFINING OBJECT, MANUFACTURING METHOD FOR SILYLATION AGENT CHEMICAL, FILM FORMATION MATERIAL OR DIFFUSION AGENT COMPOSITION, FILTER MEDIA, AND FILTER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a refining method for using a silylation agent chemical, a film formation material or a liquid of diffusion agent composition as a refining target, using a polyimide and/or polyamide porous film excellent in performance of removing an impurity such as metal, a refining method using a liquid containing a silicon compound containing a silicon compound capable of producing a silanol group by hydrolysis as a refining object, a manufacturing method for a sylilation agent chemical, a film formation material or a diffusion agent composition, using the refining method, filter media consisting of the porous film, and a filter device containing the porous film.SOLUTION: A refining method using a liquid as a refining object comprises making a part or the whole of the liquid penetrate under differential pressure from one side of a polyimide and/or polyamide porous film having communication holes to the other side, where the liquid is a sylilation agent chemical, a film formation material, or a diffusant composition used for dopant diffusion to a semiconductor substrate.SELECTED DRAWING: None