BASE ISOLATION TABLE AND ATTENUATION FORCE APPLYING MEMBER USED FOR BASE ISOLATION TABLE

摘要

PROBLEM TO BE SOLVED: To provide a base isolation table capable of conveniently adding an attenuation element against an inputted vibration and appropriately controlling an action of an upper table against an excessive inputting of vibration and provide an attenuation force applying member used for it.;SOLUTION: There are provided a lower table 2 fixed to a fixing part; an upper table 3 on which an object to be base isolated is mounted; a guide member freely guiding the upper table 3 in X-direction in respect to the lower table 2 and in a Y-direction crossing at a right angle with X-direction and holding the upper table 3 immovably in respect to the lower table 2 in regard to Z-direction crossing at a right angle with both X-direction and Y-direction; and an attenuation force applying member 5 applying a frictional attenuation against motion of the upper table 3 in respect to the lower table 2. The attenuation force applying member 5 is press contacted with both lower table 2 and upper table 3 and relatively moved in respect to both lower table 2 and the upper table 3 as the upper table 3 is moved in respect to the lower table 2.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT