EVALUATION METHOD OF SILICA POWDER APPROPRIATE FOR MANUFACTURING SILICA GLASS CRUCIBLE FOR PULLING UP SILICON SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of silica powder allowing stable manufacturing of a silica glass crucible having a bubble-free layer.;SOLUTION: The evaluation method of silica powder appropriate for forming a bubble-free layer in a silica glass crucible for pulling up a silicon single crystal includes the steps of: measuring the porosity between silica particles in silica powder; melting the silica powder; measuring the bubble content of the silica glass block produced by cooling and hardening the molten silica powder; and determining whether the silica powder is appropriate, on the basis of the porosity in the silica powder and the bubble content of the silica glass block.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT