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HIGH-PERFORMANCE LINE-FORMING OPTICAL SYSTEM AND METHOD USING SERRATION-LIKE SPATIAL FILTER

机译:高性能线性成象光学系统及采用类似串行滤波器的方法

摘要

PROBLEM TO BE SOLVED: To provide a high-performance line-forming optical system and method, in which a serration-like opening is adopted smoothening a wave pattern (ripple) of strength without substantially influencing the overall amount of strength supplied to an image surface.SOLUTION: A line forming optical system 10 includes: a laser light source 20; a light beam regulating optical system 30; a first throttling device 40; and a relay optical system 50. The relay optical system includes a second throttling device 60 having an opening 64. The opening is regulated by a pair of blades 62. The blade has a serration-like end 63 and strength fluctuation of a beam image 80 formed on an image surface IP is decreased as compared with the opening having the blade having a linear end.SELECTED DRAWING: Figure 2
机译:要解决的问题:提供一种高性能的线形成光学系统和方法,其中采用锯齿状的开口来平滑强度的波纹(波纹),而基本上不影响提供给图像表面的强度的总量解决方案:线形成光学系统10包括:激光光源20;光束调节光学系统30;第一节流装置40;中继光学系统包括具有节流孔64的第二节流装置60。该节流孔由一对叶片62调节。叶片具有锯齿状的端部63和光束图像80的强度波动。与具有线性端部的刮刀的开口相比,在图像表面IP上形成的凹痕减少了。图2

著录项

  • 公开/公告号JP2017028281A

    专利类型

  • 公开/公告日2017-02-02

    原文格式PDF

  • 申请/专利权人 ULTRATECH INC;

    申请/专利号JP20160141947

  • 发明设计人 SERGUEI ANIKITCHEV;

    申请日2016-07-20

  • 分类号H01L21/268;H01L21/265;

  • 国家 JP

  • 入库时间 2022-08-21 13:59:55

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