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HIGH-PERFORMANCE LINE-FORMING OPTICAL SYSTEM AND METHOD USING SERRATION-LIKE SPATIAL FILTER
HIGH-PERFORMANCE LINE-FORMING OPTICAL SYSTEM AND METHOD USING SERRATION-LIKE SPATIAL FILTER
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机译:高性能线性成象光学系统及采用类似串行滤波器的方法
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摘要
PROBLEM TO BE SOLVED: To provide a high-performance line-forming optical system and method, in which a serration-like opening is adopted smoothening a wave pattern (ripple) of strength without substantially influencing the overall amount of strength supplied to an image surface.SOLUTION: A line forming optical system 10 includes: a laser light source 20; a light beam regulating optical system 30; a first throttling device 40; and a relay optical system 50. The relay optical system includes a second throttling device 60 having an opening 64. The opening is regulated by a pair of blades 62. The blade has a serration-like end 63 and strength fluctuation of a beam image 80 formed on an image surface IP is decreased as compared with the opening having the blade having a linear end.SELECTED DRAWING: Figure 2
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