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METALLIC POROUS STRUCTURE BODY, MANUFACTURING METHOD THEREOF AND IMPRINT MOLD FOR MANUFACTURING METALLIC POROUS STRUCTURE BODY

机译:金属多孔结构体,其制造方法及制造金属多孔结构体的印模

摘要

PROBLEM TO BE SOLVED: To provide a method for highly accurately manufacturing a metallic porous structure body having fine-sized through holes, a metallic porous structure body manufactured by the method, and an imprint mold used for manufacturing the metallic porous structure body.;SOLUTION: In a manufacturing method of a metallic porous structure body 1, an imprint mold 30 having at least two step-like recesses 31 is used to perform an imprint process to a resist layer 20 on a base material 10, and a step-like projection 21 having at least two projections 211, 212 is formed on the base material 10. A metal layer 40 is then formed on the base material 10 where the step-like projection 21 is formed by electrical plating treatment so that part of the projection 212 located at the top of the step-like projection 21 is exposed, and the metal layer 40 is pulled away from the base material 10.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT
机译:解决的问题:提供一种高度精确地制造具有细孔的金属多孔结构体的方法,通过该方法制造的金属多孔结构体以及用于制造金属多孔结构体的压印模具。 :在金属多孔结构体1的制造方法中,具有至少两个阶梯状凹部31的压印模具30用于对基材10上的抗蚀剂层20进行压印处理,并具有阶梯状的突起。在基材10上形成具有至少两个突起211、212的图21所示的结构。然后在基材10上形成金属层40,在该金属层40上通过电镀处理形成阶梯状突起21,从而突起212的一部分位于在阶梯状突起21的顶部处暴露出金属,并且将金属层40从基底材料10上拉开;;选择的图:图1;版权:(C)2018,JPO&INPIT

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