DIFFERENT CRYSTAL INSPECTION DEVICE AND INSPECTION METHOD OF UNIDIRECTIONAL COAGULATION

摘要

PROBLEM TO BE SOLVED: To provide a different crystal inspection device and an inspection method of a unidirectional coagulation capable of detecting a fine different crystal section.;SOLUTION: A different crystal inspection device of a unidirectional coagulation includes: an illumination section 3 for irradiating an inspection object area 102 of the unidirectional coagulation with light; an imaging section 2 for imaging the inspection object area 102; and a different crystal specification section 51 for configuring such that a rotation angle φ of a direction D of radiation about the inspection object area 102 is changed when the direction D of radiation of the light is projected onto a second plane orthogonal to a first plane including the inspection object area 102, the illumination section 3, and an imaging section 2, and specifying a different crystal section in the inspection object area 102 based on a plurality of image data whose rotation angle φ obtained by the imaging section 2 is different.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT