GAS INSPECTION MACHINE CHECK-UP METHOD AND GAS INSPECTION MACHINE CHECK-UP SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a technique that can accurately check up detection accuracy of a sensor unit in checking up an operation state of a gas inspection machine, and can accurately check up a fundamental performance other than the detection accuracy of the sensor unit of importance upon actual inspection.;SOLUTION: A gas inspection machine check-up method, which supplies check-up gas including a specific component to check up an operation state with respect to a gas inspection machine 1 having an air collection unit 53 that collects inspection object air, a sensor unit 22 that is sensitive to a specific component in the inspection object air captured by the air collection unit 53, and a control unit 21 that outputs an inspection result in responce to an output of the sensor unit 22, is configured to execute: first check-up processing of supplying the check-up gas to the air collection unit 53 of the gas inspection machine 1, and checking up the operation state of the gas inspection machine; and second check-up processing of supplying the check-up gas to a check-up inlet 30 communicating with the sensor unit 22 of the gas inspection machine 1, and checking up th operation state of the gas inspection machine 1.;SELECTED DRAWING: Figure 6;COPYRIGHT: (C)2018,JPO&INPIT