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MEASUREMENT BOARD AND PROFILOMETER

机译:测量板和利润表

摘要

PROBLEM TO BE SOLVED: To provide a measurement board and a profilometer that can reduce errors of measurement values in measurement of a measurement target object and can increase the accuracy of measurement even if a laser displacement meter which is cheap and has a low resolution is used.;SOLUTION: The present invention relates to a measurement board 30 for placing a measurement target object 100 on the surface, of a profilometer used for measuring the surface shape of the measurement target object by allowing a laser displacement meter 41 capable of measuring a distance to the measurement target object by a laser light to make a surface of the measurement target object relatively scan while irradiating the surface shape thereof with a laser light. The measurement board has a recess 30a recessed in a position lower than at least a measurement position of the measurement target object irradiated with the laser light more than the other regions not including the measurement position, or a through-hole.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT
机译:要解决的问题:提供一种测量板和轮廓仪,即使使用便宜且分辨率低的激光位移计,也可以减少测量目标物体时测量值的误差,并可以提高测量精度。解决方案:本发明涉及一种测量板30,用于通过允许能够测量距离的激光位移计41在用于测量被测物体的表面形状的轮廓仪上放置被测物体100的表面。通过用激光照射被测量物,以在使被测量物的表面形状照射激光的同时使被测量物的表面相对扫描。测量板具有凹部30a,该凹部30a凹入到比不包括测量位置的其它区域或通孔多的,比被激光照射的测量对象物的测量位置低的位置处。 1;版权:(C)2017,日本特许厅&INPIT

著录项

  • 公开/公告号JP2017032297A

    专利类型

  • 公开/公告日2017-02-09

    原文格式PDF

  • 申请/专利权人 MINEBEA CO LTD;

    申请/专利号JP20150149558

  • 发明设计人 TAKASU SHIGERU;

    申请日2015-07-29

  • 分类号G01B11/24;

  • 国家 JP

  • 入库时间 2022-08-21 13:59:11

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