TRANSFER METHOD OF MINUTE SUBSTANCE, TRANSFER DEVICE FOR MINUTE SUBSTANCE, DISSOLUTION METHOD OF MINUTE SUBSTANCE AND DISSOLUTION METHOD OF MINUTE SUBSTANCE

摘要

PROBLEM TO BE SOLVED: To provide a transfer method of a minute substance capable of stably supplying the minute substance into a liquid with less in risk of back flow.;SOLUTION: There is provided a transfer method of a minute substance for transferring the minute substance 16 into a tank 1 by using pressure difference in and out of the tank 1, which includes a process tip immersion process for immersing a tip opening 9B arranged at a tip of a minute substance induction part 9 extending in and out of the tank 1 and opening vertical lower or vertical oblique lower in the tank 1 into a liquid 15 stored in the tank 1, a gas release process for introducing gas in the minute substance induction part 9 and releasing the gas from the tip opening 9B and a minute substance transfer process for transferring the minute substance 16 into the liquid 15 in the tank 1 via the minute substance induction part 9 and the tip opening 9B during duration of the gas release process.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT