FEED DRIVE SYSTEM AND DESIGNING METHOD OF FEED DRIVE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a feed drive system capable of suppressing deterioration of stability of a system which occurs when control gain becomes bigger.;SOLUTION: A feed drive system, which is configured by a feed drive mechanism 101 which moves on a stationary guide rail and moves a table on which a workpiece is placed to a prescribed position and a control device 102 which generates a movement control signal for moving the table to the prescribed position and transmits it to the feed drive mechanism on the basis of feedback information which shows displacement of the table with respect to the guide rail, includes a compensator 103 which generates a first control signal that shows virtual frictional force in the feed drive mechanism on the basis of the feedback information. The feed drive mechanism is configured in such a manner that it performs movement of the table to the prescribed position by using the movement control signal output from the control device and the generated first control signal.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT