PATTERN EDITING PROGRAM, SHOT DATA CREATION PROGRAM, PATTERN EDITING DEVICE, SHOT DATA CREATION DEVICE, PATTERN EDITING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern editing program capable of creating plot data easily in a short time, and to provide a shot data creation program, a pattern editing device, a shot data creation device, and a pattern editing method.SOLUTION: A pattern editing device includes a reference approximate data creation unit for creating reference approximate data about the circumference of a reference sector sandwiched between the radius of a design pattern, i.e., the first diameter and second diameter, and having a central angle of 45°, and duplication approximate data creation means for creating 90° approximate data about the circumference of a sector having a central angle of 90°, by duplicating the reference sector line symmetrically with the second radius as the symmetric axis.SELECTED DRAWING: Figure 1